Transversely-excited film bulk acoustic resonator with low thermal impedance

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United States of America Patent

PATENT NO 11936358
APP PUB NO 20220149807A1
SERIAL NO

17217923

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Abstract

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An acoustic resonator device with low thermal impedance has a substrate and a single-crystal piezoelectric plate having a back surface attached to a top surface of the substrate via a bonding oxide (BOX) layer. An interdigital transducer (IDT) formed on the front surface of the plate has interleaved fingers disposed on the diaphragm. The piezoelectric plate and the BOX layer are removed from a least a portion of the surface area of the device to provide lower thermal resistance between the conductor pattern and the substrate.

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Costa, James R Lompoc, US 15 54
Dyer, Greg Santa Barbara, US 39 52
Fenzi, Neal O Santa Barbara, US 31 283
O'Brien, Chris San Diego, US 32 166

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