Method for four direction low capacitance ESD protection

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United States of America Patent

PATENT NO 7910999
APP PUB NO 20090101937A1
SERIAL NO

12342294

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention describes a structure and a process for providing ESD semiconductor protection with reduced input capacitance. The structure consists of heavily doped P+ guard rings surrounding the I/O ESD protection device and the Vcc to Bss protection device. In addition, there is a heavily doped N+ guard ring surrounding the I/O protection device its P+ guard ring. The guard rings enhance structure diode elements providing enhanced ESD energy discharge path capability enabling the elimination of a specific conventional Vss to I/O pad ESD protection device. This reduces the capacitance seen by the I/O circuit while still providing adequate ESD protection for the active circuit devices.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Shui-Hunyi Hsin-Chu, TW 2 128
Lee, Jian-Hsing Hsin-Chu, TW 170 1944

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