Method and device for measuring transverse thermal conductivity of thin film

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United States of America Patent

PATENT NO 11193902
SERIAL NO

16644160

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosure provides a method for measuring the transverse thermal conductivity of a thin film. The method comprises the steps of measuring the longitudinal thermal conductivity of a thin film to be measured by using a 3ω method and by taking a second metal strip deposited on the surface of the thin film to be measured as a heating source at first; measuring the temperature rise of the thin film to be measured in the longitudinal direction by using the 3ω method, and deducing the thermal power of the thin film to be measured in the longitudinal direction; and finally, calculating the transverse thermal conductivity of the thin film to be measured. By adopting a ‘substrate/thin film to be measured/metal strip’ sample structure, the process difficulty of preparing a suspension structure sample can be effectively avoided.

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Patent Owner(s)

  • WUHAN JOULE YACHT SCIENCE & TECHNOLOGY CO.,LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Yingrui Hubei, CN 2 3
Miao, Xiangshui Hubei, CN 41 74
Tong, Hao Hubei, CN 20 23
Wang, Kaizhan Hubei, CN 7 39
Wang, Yuanbing Hubei, CN 3 6
Zhou, Lingjun Hubei, CN 4 6

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