Wafer cassette equipped with piezoelectric sensors
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United States of America Patent
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Jun 8, 2004
Grant Date -
Apr 17, 2003
app pub date -
Oct 12, 2001
filing date -
Oct 12, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer cassette for storing and transporting wafers that is equipped with sensors such as piezoelectric sensors or capacitance sensors on the surface of the dividers for sensing the presence or absence of wafers positioned on top of the dividers is described. The sensors are capable of detecting any defective placement of wafers such as a cross-slot placement or a double placement such that the condition can be corrected by a machine operator and a wafer cassette can be stopped before it is loaded into an internal buffer of a process machine.
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