Two-fluid cleaning jet nozzle and cleaning apparatus, and method utilizing the same
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United States of America Patent
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Jul 6, 1999
Grant Date -
N/A
app pub date -
Jul 11, 1997
filing date -
Dec 2, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A two-fluid cleaning jet nozzle has an atomizing unit provided with an atomizing tube in which a liquid is atomized by a pressurized gas into liquid droplets, and an accelerating unit provided with an accelerating tube which accelerates and jets the liquid droplets against the surface of a workpiece to remove dust particles adhering to the surface of the workpiece. The sectional area of the atomizing tube available for gas flow is greater than the sectional area of the accelerating tube available for flow of the gas and the liquid droplets. The accelerating tube has the shape of a straight cylindrical tube or a Laval nozzle.
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