Inertial sensor, electronic device, and movable body

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United States of America Patent

PATENT NO 11579164
APP PUB NO 20210255212A1
SERIAL NO

17178575

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An inertial sensor, includes: a substrate; a fixing portion that is provided on the substrate; a first movable body that faces the substrate and that is displaceable with a first support beam as a first rotation axis; the first support beam that is arranged in a first direction and that couples the first movable body and the fixing portion; a second movable body that is displaceable due to deformation of a second support beam; the second support beam that is arranged in a second direction intersecting the first direction and that couples the first movable body and the second movable body; and a protrusion that is provided on the substrate or the second movable body, overlaps the second movable body in plan view from a third direction and that protrudes toward the second movable body or the substrate.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION4-1 NISHI-SHINJUKU 2-CHOME SHINJUKU-KU TOKYO 163-0811

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagata, Kazuyuki Minowa, JP 30 66
Tanaka, Satoru Chino, JP 335 3292

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