Method and apparatus for calibration of substrate temperature using pyrometer

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United States of America Patent

PATENT NO 11543296
APP PUB NO 20200378832A1
SERIAL NO

16551128

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Abstract

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A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anella, Steven West Newbury, US 13 87
Lischer, D Jeffrey Acton, US 24 638
McLane, James Beverly, US 2 2
Pomerleau, Bradley M Beverly, US 3 3
Sun, Dawei Lynnfield, US 46 37
Wilson, Eric D Rockport, US 9 185

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