High-frequency power supply system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11990317
APP PUB NO 20230207264A1
SERIAL NO

18086406

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Importance

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Abstract

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To simplify a process of suppressing an increase in a reflected wave power caused by IMD, provided is a high-frequency power supply system for providing a high-frequency power to a load, including: a first power supply for supplying a first high-frequency power to the load; a second power supply for supplying a second high-frequency power to the load; and a matching device. The matching device provides a system clock to each of the first power supply and the second power supply. The second power supply outputs a second high-frequency voltage at a control period determined based on the system clock provided from the matching device. The first power supply outputs a first high-frequency voltage obtained by frequency modulation of a fundamental wave signal having a first fundamental frequency and through amplification, in each control period determined based on the system clock provided from the matching device.

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Patent Owner(s)

  • DAIHEN CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hasegawa, Yuichi Osaka, JP 96 594

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