Data representation relating to a non-sampled workpiece
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United States of America Patent
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Jun 26, 2007
Grant Date -
Mar 15, 2007
app pub date -
Sep 12, 2005
filing date -
Sep 12, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.
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