Wind speed sensor based on a flexible inductor and a silicon-based inductor

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United States of America Patent

PATENT NO 11585825
SERIAL NO

17054133

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Abstract

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Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.

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  • SOUTHEAST UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Deng, Wenjun Nanjing, CN 31 4
Huang, Qingan Nanjing, CN 4 0
Qin, Ming Nanjing, CN 5 9
Wang, Lifeng Nanjing, CN 111 644
Wang, Yu Nanjing, CN 1261 7108
Yi, Zhenxiang Nanjing, CN 1 0

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