Plane grating calibration system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11940349
APP PUB NO 20220260452A1
SERIAL NO

17610730

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • 501 TSINGHUA UNIVERSITY; BEIJING U-PRECISION TECH CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Rong Beijing, CN 30 45
Hao, Jiankun Beijing, CN 1 0
Hu, Jinchun Beijing, CN 28 43
Li, Xin Beijing, CN 834 6351
Wang, Leijie Beijing, CN 21 21
Yang, Kaiming Beijing, CN 29 52
Zhang, Ming Beijing, CN 829 6657
Zhu, Yu Beijing, CN 359 3309

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Sep 26, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 26, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 26, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00