Apparatus and method for detecting a wafer in a cassette

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11923223
APP PUB NO 20230147310A1
SERIAL NO

18053071

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A warning is issued about an irregularity concerning a wafer stored in a cassette if a difference between a value of an apparent thickness of the wafer and the previously obtained value of an actual thickness of the wafer exceeds a threshold value, the value of the apparent thickness of the wafer being obtained by a non-contact-type sensor for detecting a front portion of the wafer laterally of the wafer. Consequently, the wafer is prevented from being damaged when it is taken out of the cassette.

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Patent Owner(s)

  • DISCO CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ryu, Jonghyun Tokyo, JP 11 16
Saito, Yoshinobu Tokyo, JP 55 87

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