Complementary FET (CFET) buried sidewall contact with spacer foot

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11710699
APP PUB NO 20230062819A1
SERIAL NO

17463704

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A CFET includes a fin that has a bottom channel portion, a top channel portion, and a channel isolator between the bottom channel portion and the top channel portion. The CFET further includes a source and drain stack that has a bottom source or drain (S/D) region connected to the bottom channel portion, a top S/D region connected to the top channel portion, a source-drain isolator between the bottom S/D region and the top S/D region. The CFET further includes a spacer foot physically connected to a base sidewall portion of the bottom S/D region and a buried S/D contact that is physically connected to an upper sidewall portion of the bottom S/D region. The CFET may further include a common gate around the bottom channel portion, around the top channel portion, and around the channel isolator.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Kangguo Schenectady, US 3075 29875
Vega, Reinaldo Mahopac, US 94 284
Xie, Ruilong Niskayuna, US 1447 10827
Zhang, Jingyun Albany, US 205 1082

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