Fully reticulated detectors for curved focal plane arrays
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United States of America Patent
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Feb 14, 2023
Grant Date -
N/A
app pub date -
Oct 1, 2020
filing date -
Oct 18, 2019
priority date (Note) -
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Abstract
A curved FPA comprises an array of detectors, with mesas etched between the detectors such that they are electrically and physically isolated from each other. Metallization deposited at the bottom of the mesas reconnects the detectors electrically and thereby provides a common ground between them. Strain induced by bending the FPA into a curved shape is across the metallization and any backfill epoxy, rather than across the detectors. Indium bumps are evaporated onto respective detectors for connection to a readout integrated circuit (ROIC). An ROIC coupled to the detectors is preferably thinned, and the backside of the ROIC may also include mesas such that the ROIC is reticulated.
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