Dual head X-ray inspection system

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United States of America

PATENT NO 11969276
SERIAL NO

18142161

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Abstract

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A sample inspection system is described. The system comprises at least first and second inspection units positioned above a sample region. Each of said at least first and second inspection unit comprises at least one X-ray radiation source and respective detector arrangement and configured for X-ray fluorescent inspection of a sample. Wherein the first and second x-ray inspection units provide first and second inspection properties different in at least one of: bandwidth of emitted X-ray energies, energy of emitted X-rays, spot size of X-ray beam generated on a sample.

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Patent Owner(s)

  • XWINSYS TECHNOLOGY DEVELOPMENT LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ogata, Kiyoshi Tokyo, JP 83 888
Oiknine, Ofek Ramat Yishai, IL 1 0
Reinis, Doron Gival Ela, IL 4 5
Shklar, Avishai Kfar Vitkin, IL 3 46

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