Motion control system and X-ray measurement apparatus
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United States of America Patent
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Apr 29, 2014
Grant Date -
Mar 1, 2012
app pub date -
Aug 29, 2011
filing date -
Aug 30, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A motion control system comprising a servo motor for moving a rotary stage; a scale provided on the rotary stage or on an object that moves integrally with the rotary stage; a plurality of reading heads for detecting the scale and outputting a signal; a data processing part for calculating an average value of rotation angle data based on each of the output signals from the reading heads and outputting the average value as a signal; and a servo amplifier for controlling the motor based on the signal representing the average value of the rotation angle. The motion control system can cause the rotary stage to rotate to a desired rotation angle to a high degree of accuracy using the reading heads.
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