Method of manufacturing sensor and resistor element
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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May 28, 2002
Grant Date -
N/A
app pub date -
Jan 20, 2000
filing date -
May 22, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sensor in which a field effect transistor element 3 having a gate electrode 6 on its rear side is electrically connected onto a resistive element 2 having a top surface electrode and a bottom surface electrode in such a way that the gate electrode 6 and a portion of the top surface electrode of the resistive element 2 coincides, and a grounding electrode 12 on a substrate is electrically connected with the bottom surface electrode of the resistive element 2 so that they coincides.
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