Polishing apparatus
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United States of America Patent
Stats
-
Jun 26, 2007
Grant Date -
Oct 5, 2006
app pub date -
Mar 30, 2006
filing date -
Apr 1, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The polishing apparatus is capable of transferring a work piece to a top ring without moving the work piece from the center and capable of precisely polishing the work piece. The polishing apparatus has a transfer unit for transferring the work piece to the top ring. The transfer unit comprises: a guide member having a receiving section, which centers the work piece; a mounting table vertically moving with respect to the guide member, the mounting table having a mounting section, which receives the centered work piece; and a supporting mechanism supporting the mounting table and allowing the mounting table to move downward. The mounting table is relatively moved close to the top ring and presses the work piece onto the top ring so as to transfer the work piece to the top ring.
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Cited Art Landscape
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