Masking process and mask set

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United States of America

PATENT NO 11204546
APP PUB NO 20200073229A1
SERIAL NO

16394103

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A masking process and a mask set. The masking process includes: aligning a first mask with a stage carrying a substrate to be patterned; forming a first layer structure and a first overlay correction pattern on the substrate to be patterned by using the first mask; correcting with an image sensor and the first overlay correction pattern; aligning a second mask with the stage; forming a second layer structure and a second overlay correction pattern on the substrate to be patterned by using the second mask; and correcting with the image sensor and the second overlay correction pattern.

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Patent Owner(s)

  • BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.; BOE TECHNOLOGY GROUP CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dong, Hao Beijing, CN 59 51
Liu, Zhiheng Beijing, CN 8 20

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