Vertical field effect transistor (FET) with source and drain structures

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11316045
APP PUB NO 20210159336A1
SERIAL NO

16691691

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Abstract

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The present disclosure relates to semiconductor structures and, more particularly, to vertical field effect transistors (FETS) and methods of manufacture. The structure includes: a substrate material; at least one vertically oriented gate structure extending into the substrate material and composed of a gate dielectric material and conductive gate material; and vertically oriented source/drain regions extending into the substrate material and composed of conductive dopant material and a silicide on the source/drain regions.

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Patent Owner(s)

  • GLOBALFOUNDRIES U.S. INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ellis-Monaghan, John J Grand Isle, US 254 2538
Shank, Steven M Jericho, US 219 846
Stamper, Anthony K Burlington, US 613 6590
Vallett, Aaron L Jericho, US 7 4

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