Piezoelectric element, liquid-jet head and liquid-jet apparatus
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United States of America Patent
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Mar 3, 2009
Grant Date -
Nov 2, 2006
app pub date -
Mar 21, 2006
filing date -
Mar 22, 2005
priority date (Note) -
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Abstract
Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a liquid-jet head and a liquid-jet apparatus. The piezoelectric element includes a lower electrode provided above a substrate, a piezoelectric layer provided above the lower electrode, and an upper electrode provided above the piezoelectric layer, and an electric resistivity of the piezoelectric layer is not lower than 20 MΩ·cm.
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