Inspection apparatus and inspection system

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United States of America Patent

PATENT NO 11162930
APP PUB NO 20190056370A1
SERIAL NO

16079447

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Abstract

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An inspection apparatus includes a container, first and second detectors, and a controller. The container stores a specimen. The first detector detects a substance emitted by the specimen stored in the container. The second detector detects a different component than the substance in the atmosphere inside the container. The controller corrects the result of detection of the substance by the first detector on the basis of the component detected by the second detector and judges a quality of the specimen.

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Patent Owner(s)

  • KYOCERA CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobori, Shinichi Saitama, JP 6 53
Yamasaki, Hirohide Yokohama, JP 9 2

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