Laser-sustained plasma light source

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United States of America Patent

PATENT NO 9516733
SERIAL NO

14814636

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Abstract

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A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Mountain View, US 68 467
Delgado, Gildardo R Livermore, US 24 99
Shchemelinin, Anatoly Bozeman, US 50 454
Zhao, Yanming Milpitas, US 10 43

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