Device and method for measuring position of liquid surface or melt in single-crystal-growing apparatus

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United States of America Patent

PATENT NO 7172656
APP PUB NO 20040221794A1
SERIAL NO

10822662

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a device and a method for measuring the position of the liquid surface of a melt while a single crystal is being pulled, two measuring-lines are defined in an image of a fusion ring which is captured by means of a two-dimensional CCD camera, the intersections of the respective measuring lines and the fusion ring, on the opposite sides of the fusion ring, are detected, and the central position of the single crystal is calculated based on the intervals between the intersections on the opposite sides of the fusion ring, whereby the position of the liquid surface of the melt is determined.

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Patent Owner(s)

  • SUMITOMO MITSUBISHI SILICON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takanashi, Keiichi Tokyo, JP 37 133
Takase, Nobumitsu Tokyo, JP 16 123

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