Quick and accurate modeling of transmitted field

United States of America Patent

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Nov 13, 2007
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Sep 1, 2005
app pub date
Feb 27, 2004
filing date
Feb 27, 2004

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Abstract

Systems and techniques to quickly and accurately model a transmitted electromagnetic field through a mask, to design a mask, and to create a library of corrections including edge corrections, edge-to-edge corrections, and corner corrections.

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INTEL CORPORATION

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G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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Inventor Name	Address	# of filed Patents	Total Citations
Liu, Peng	Sunnyvale, CA	760	5543
Singh, Vivek	Portland, OR	98	748

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Quick and accurate modeling of transmitted field

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10789703

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PATENT NO	7294437
APP PUB NO	20050191566A1
SERIAL NO	10789703
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 13, 2007	US,7294437,B2 US7294437B2	GRANTED PATENT AS SECOND PUBLICATION
September 01, 2005	US,20050191566,A1 US20050191566A1	FIRST PUBLISHED PATENT APPLICATION

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10789703

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