Hollow-core photonic crystal fiber based broadband radiation generator

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United States of America Patent

PATENT NO 11846867
SERIAL NO

17539347

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Abstract

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A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pongers, Willem Richard Veldhoven, NL 14 25
Ravensbergen, Janneke Würzburg, DE 8 15
Uebel, Patrick Sebastian Marloffstein, DE 35 79

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