Surface measurement method, component manufacturing method, component inspection method, and component measurement device

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United States of America Patent

PATENT NO 11781861
SERIAL NO

17272672

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Abstract

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In a surface measurement method, a measurement surface is irradiated with a coherent light beam, reflected light reflected from the measurement surface is projected to a screen to form an optical image; and the optical image is captured by an optical sensor when the screen is continuously moved in one direction when the optical image is captured by the optical sensor.

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Patent Owner(s)

  • HITACHI ASTEMO, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jong, Jeremy Hitachinaka, JP 1 0
Maruyama, Shigenobu Kasumigaura, JP 27 396
Miyata, Kazushi Mobara, JP 31 276

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