Apparatus for trapping of reaction by-product capable of expanding the area for collection by inducing gas flow

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United States of America Patent

PATENT NO 11872515
APP PUB NO 20230277972A1
SERIAL NO

17832268

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Abstract

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The present disclosure relates to an apparatus for trapping of a reaction by-product capable of expanding the area for collection by inducing a gas flow, in which an internal trapping tower of the apparatus for trapping of a reaction by-product, which traps a reaction by-product contained in gas discharged from a process chamber during a semiconductor manufacturing process, is divided into multiple stages, the introduced gas is guided to a lower side of an inner region of an intermediate trapping unit provided as a space portion and discharged to an outer region while a trapping reaction occurs according to the reaction by-product trapping amount during a former part of a use duration time.

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Patent Owner(s)

Patent OwnerAddress
MILAEBO CO LTDPYEONGTAEK-SI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Che Hoo Seoul, KR 15 61
Kim, In Hwan Osan-si, KR 50 270
Lee, Jun Min Osan-si, KR 19 23
Lee, Yeon Ju Osan-si, KR 19 33

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