Method of forming a miniature, surface microsurfaced differential microphone
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United States of America Patent
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Jul 10, 2012
Grant Date -
Nov 24, 2011
app pub date -
Aug 4, 2011
filing date -
Jan 31, 2006
priority date (Note) -
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Abstract
A differential microphone having a perimeter slit formed around the microphone diaphragm that replaces the backside hole previously required in conventional silicon, micromachined microphones. The differential microphone is formed using silicon fabrication techniques applied only to a single, front face of a silicon wafer. The backside holes of prior art microphones typically require that a secondary machining operation be performed on the rear surface of the silicon wafer during fabrication. This secondary operation adds complexity and cost to the micromachined microphones so fabricated. Comb fingers forming a portion of a capacitive arrangement may be fabricated as part of the differential microphone diaphragm.
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