Microelectromechanical systems device test system and method
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United States of America Patent
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May 14, 2019
Grant Date -
May 3, 2018
app pub date -
Oct 27, 2016
filing date -
Oct 27, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A system includes a rotary platform adapted to undergo oscillatory motion about a fixed point, a test fixture coupled to the rotary platform, the test fixture being adapted to receive a device-under-test, and an inertial sensor mounted to the rotary platform for providing a motion output signal indicative of the oscillatory motion. A controller is in communication with the rotary platform and inertial sensor. The controller receives the motion output signal and provides a drive signal to the rotary platform responsive to the motion output signal. The controller generates the drive signal in response a test profile and the motion output signal provides feedback of actual movement of the rotary platform. The motion output signal is input to the controller to ensure correspondence between the drive signal and the test profile. A multitude of differing validated environmental vibrational stimuli effects can be evaluated via a sense signal from the device.
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