Swept frequency laser metrology system
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United States of America Patent
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Jul 27, 2010
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N/A
app pub date -
Oct 26, 2007
filing date -
Nov 16, 2006
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Abstract
resulting from the laser frequency swept gives target position. The reference delay-line is the only absolute reference needed in the metrology system and this provides an ultra-stable reference and simple/economical system.
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