Scintillator for charged particle beam apparatus and charged particle beam apparatus

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United States of America Patent

PATENT NO 11846736
APP PUB NO 20220244412A1
SERIAL NO

17617277

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Abstract

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The purpose of the present invention is to provide a scintillator for a charged particle beam device and a charged particle beam device which achieve both an increase in emission intensity and a reduction in afterglow intensity. This scintillator for a charged particle beam device is characterized by comprising a substrate (13), a buffer layer (14) formed on a surface of the substrate (13), a stack (12) of a light emitting layer (15) and a barrier layer (16) formed on a surface of the buffer layer (14), and a conductive layer (17) formed on a surface of the stack (12) and by being configured such that the light emitting layer (15) contains InGaN, the barrier layer (16) contains GaN, and the ratio b/a of the thickness b of the barrier layer (16) to the thickness a of the light emitting layer (15) is 11 to 25.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECH CORPORATION17-1 TORANOMON 1-CHOME MINATO-KU TOKYO 105-6409

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imamura, Shin Tokyo, JP 42 92
Mizutani, Shunsuke Tokyo, JP 41 133
Suzuki, Makoto Tokyo, JP 471 4794
Takahashi, Eri Tokyo, JP 21 65

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