Cleaning machine and cleaning method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11935737
APP PUB NO 20230054051A1
SERIAL NO

17441660

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed in the present disclosure are a cleaning machine and a cleaning method. The cleaning machine includes: a wet cleaning module, configured to execute a wet cleaning process on a wafer; a dry cleaning module, configured to execute a dry cleaning process on the wafer; a conveying module, configured to input the wafer into the wet cleaning module or the dry cleaning module, or output the wafer from the wet cleaning module or the dry cleaning module; a transferring module, configured to transfer the wafer from the wet cleaning module to the dry cleaning module or transfer the wafer from the dry cleaning module to the wet cleaning module; and a processing module, configured to extract gas from the transferring module.

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First Claim

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Patent Owner(s)

  • CHANGXIN MEMORY TECHNOLOGIES, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Xi, Ning Hefei, CN 108 2236

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