Methods and systems for detecting defects in devices using X-rays

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United States of America Patent

PATENT NO 11688067
APP PUB NO 20210012499A1
SERIAL NO

16924581

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In one embodiment, an automated high-speed X-ray inspection system may generate a first X-ray image of an inspected sample at a first direction substantially orthogonal to a plane of the inspected sample. The first X-ray image may be a high-resolution grayscale image. The system may identify one or more elements of interest of the inspected sample based on the first X-ray image. The first X-ray image may include interfering elements that interfere with the one or more elements of interest in the first X-ray image. The system may determine one or more first features associated with respective elements of interest based on variations of grayscale values in the first X-ray images. The system may determine whether one or more defects are associated with the respective elements of interest based on the one or more first features associated with the element of interest.

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Patent Owner(s)

  • BRUKER NANO, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adler, David Lewis San Jose, US 13 180
Babian, Freddie Erich Palo Alto, US 7 73
Jewler, Scott Joseph San Jose, US 6 13

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