Crystal pulling systems having fluid-filled exhaust tubes that extend through the housing

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11976379
APP PUB NO 20220136129A1
SERIAL NO

17496547

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. In some embodiments, the exhaust tube extends through the bottom of the crystal puller housing and through a bottom heat shield within the ingot puller housing.

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Patent Owner(s)

  • GLOBALWAFERS CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dioda, Mauro Bolzano, IT 2 32
Haringer, Stephan Ciardes, IT 24 39
Sreedharamurthy, Hariprasad Xenia, US 28 92
Zardoni, Marco Merano, IT 7 6

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