Stress sensor and manufacturing method therefor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11959815
APP PUB NO 20210278292A1
SERIAL NO

17329675

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Abstract

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Disclosed herein is a stress sensor that includes a stress detection layer including a laminated body including a first ferromagnetic layer, a first non-magnetic layer, a second ferromagnetic layer, and an antiferromagnetic layer stacked one on another. The antiferromagnetic layer includes Mn, and the magnetization direction of the second ferromagnetic layer is fixed by the exchange bias caused by the exchange coupling with the antiferromagnetic layer. The stress sensor detects a stress by an electric resistance depending upon a relative angle between magnetization directions of the first ferromagnetic layer and the second ferromagnetic layer, the relative angle changing depending upon an externally applied stress.

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.; JAPAN AS REPRESENTED BY PRESIDENT OF THE UNIVERSITY OF TOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Akira Nagaokakyo, JP 110 1108
Chiba, Daichi Tokyo, JP 8 36

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