Test wafer unit and test system

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United States of America Patent

PATENT NO 8289040
APP PUB NO 20110095777A1
SERIAL NO

12947721

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Abstract

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A wafer unit for testing is electrically connected to a plurality of chips to be tested formed on a wafer to be tested, the wafer unit for testing including: a connecting wafer provided to face the wafer to be tested, and to be electrically connected to each of the plurality of chips to be tested; and a temperature distribution adjusting section provided on the connecting wafer, and to adjust a temperature distribution of the wafer to be tested.

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Patent Owner(s)

  • ADVANTEST CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamaguchi, Shinichi Kanagawa, JP 65 375
Kawaguchi, Yasushi Saitama, JP 19 103
Komoto, Yoshio Gunma, JP 10 48
Umemura, Yoshiharu Kanagawa, JP 11 69

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