MEMS shock cushion spring systems and methods
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United States of America Patent
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Jul 19, 2016
Grant Date -
Oct 24, 2013
app pub date -
Mar 15, 2013
filing date -
Nov 15, 2010
priority date (Note) -
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Abstract
Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.
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