Monitor wafer purchase and controls database
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United States of America Patent
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-
Aug 8, 2006
Grant Date -
N/A
app pub date -
Jul 6, 2005
filing date -
Jul 6, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Controlling stocker capacity in an automated facility and controlling monitor budgets by capped releases, capped FOUP supplies, and wafer reuse methodology. A Database is used to order, track, and reclaim test (monitor) wafers in the FAB. The database automatically controls the amount of FOUPs in the FAB as well as the amount of wafers released into the FAB each day. This database also interacts with the Control Center in helping to release monitor wafers in the FAB.
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