Wafer hanger useful for thermally treating semiconductor wafers
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United States of America Patent
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-
Oct 30, 1990
Grant Date -
N/A
app pub date -
Oct 20, 1989
filing date -
Jul 11, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer hanger has a rod member and a supporting member. The rod member is inserted into respective notches formed in semiconductor wafers, and then placed on the supporting member. The wafer hanger holding the wafers is put into a furnace for heat treatment of the wafers. Since the wafers are hung from the rod member, plastic deformation due to the gravity of the wafers is not caused in the wafers.
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