Structures including means for lateral current carrying capability improvement in semiconductor devices

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United States of America Patent

PATENT NO 7904868
APP PUB NO 20090106726A1
SERIAL NO

11873711

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Abstract

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A design structure including a semiconductor structure. The semiconductor structure includes (a) a substrate; (b) a first semiconductor device on the substrate; (c) N ILD (Inter-Level Dielectric) layers on the first semiconductor device, wherein N is an integer greater than one; and (d) an electrically conductive line electrically coupled to the first semiconductor device. The electrically conductive line is adapted to carry a lateral electric current in a lateral direction parallel to an interfacing surface between two consecutive ILD layers of the N ILD layers. The electrically conductive line is present in at least two ILD layers of the N ILD layers. The electrically conductive line does not comprise an electrically conductive via that is adapted to carry a vertical electric current in a vertical direction perpendicular to the interfacing surface.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Feilchenfeld, Natalie Barbara Jericho, US 13 302
He, Zhong-Xiang Essex Junction, US 175 1736
Liu, Qizhi Essex Junction, US 213 1352
Rainey, BethAnn Williston, US 26 1146
Wang, Ping-Chuan Hopewell Junction, US 189 1891
Watson, Kimball M Essex Junction, US 25 144

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