Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor
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United States of America Patent
Stats
-
May 1, 2007
Grant Date -
May 25, 2006
app pub date -
Jan 10, 2006
filing date -
Jan 24, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vibrating gyro element includes in the same plane a base portion; a pair of vibrating arms for detection extended out of the base portion on both sides in a straight line shape; a pair of connecting arms extended-out from the base portion onto both sides in directions perpendicular to the vibrating arms for detection; a pair of vibrating arms for driving each extended-out from the tip portion of each of the connecting arms to both sides perpendicularly to this tip portion; four beams extended out of the base portion; and a support portion connected to the tip of each of the beams; wherein each of the beams is once extended out of the base portion in a direction approximately perpendicular to the extending-out direction of the vibrating arm for driving.
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