Three-dimensional semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11398491
APP PUB NO 20210375904A1
SERIAL NO

17403544

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A three-dimensional semiconductor device comprises a stack structure on a lower structure, a vertical channel structure passing through the stack structure, and a first vertical support structure passing through the stack structure and spaced apart from the vertical channel structure. The stack structure includes interlayer insulation layers and gate horizontal patterns, alternately stacked in a vertical direction perpendicular to an upper surface of the lower structure. The vertical channel structure and the first vertical support structure have different cross-sectional shapes. The vertical channel structure further includes a channel semiconductor layer. The vertical channel structure includes first and second vertical regions, and a width variation portion between the first and second vertical regions. The interlayer insulation layers include an intermediate interlayer insulation layer adjacent to the width variation portion. The intermediate interlayer insulation layer has the same thickness as that of an interlayer insulation layer adjacent in the vertical direction.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SAMSUNG ELECTRONICS CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baek, Seok Cheon Hwaseong-si, KR 26 129

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jan 26, 2026
7.5 Year Payment $3600.00 $1800.00 $900.00 Jan 26, 2030
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 26, 2034
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00