Method and apparatus for electronic device manufacture using shadow masks
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United States of America Patent
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May 12, 2009
Grant Date -
Mar 29, 2007
app pub date -
Sep 27, 2005
filing date -
Sep 27, 2005
priority date (Note) -
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Abstract
Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least two shadow masks associated therewith. Each of the two masks is alternately positioned within the corresponding deposition vessel for patterning the deposition material onto the substrate through apertures in the mask positioned therein, and positioned in an adjacent cleaning vessel for mask cleaning. The patterning onto the substrate and the cleaning of at least one of the masks are performed concurrently.
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