Electrochemical deposition platform for nanostructure fabrication
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United States of America Patent
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Jun 7, 2011
Grant Date -
Jan 1, 2009
app pub date -
Feb 20, 2008
filing date -
Feb 20, 2007
priority date (Note) -
Expired
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Abstract
Probe-based methods are provided for formation of one or more nano-sized or micro-sized elongated structures such as wires or tubes. The structures extend at least partially upwards from the surface of a substrate, and may extend fully upward from the substrate surface. The structures are formed via a localized electrodeposition technique. The electrodeposition technique of the invention can also be used to make modified scanning probe microscopy probes having an elongated nanostructure at the tip or conductive nanoprobes. Apparatus suitable for use with the electrodeposition technique are also provided.
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