Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
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United States of America Patent
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Jun 28, 2011
Grant Date -
Jan 3, 2008
app pub date -
Jun 30, 2006
filing date -
Jun 30, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
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Cited Art Landscape
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