Fin-shaped semiconductor device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 31, 2006
Grant Date -
Mar 10, 2005
app pub date -
Feb 9, 2004
filing date -
Sep 9, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor layer in which a primary part of a FinFET is formed, i.e., a fin has a shape which is long in a direction x and short in a direction y. A width of the fin in the direction y changes on three stages. First, in a channel area between gate electrodes each having a gate length Lg, the width of the fin in the direction y is Wch. Further, the width of the fin in the direction y in a source/drain extension area adjacent to the channel area in the direction x is Wext (>Wch). Furthermore, the width of the fin in the direction y in a source/drain area adjacent to the source/drain extension area in the direction x is Wsd (>Wext).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully