Transition radiation apparatus

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United States of America Patent

PATENT NO 7214950
APP PUB NO 20060033053A1
SERIAL NO

10917819

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In one embodiment of the present invention, thermal deformation or bending of membranes in a transition radiation emitting structure can be reduced by providing flex regions in the membranes or the membrane support structures. In a second embodiment, deformation of membranes is compensated for by fabricating the membranes to cooperatively bend in a similar manner and direction. In a third embodiment, deformation of the membrane is reduced by fabricating the membranes with an intrinsic tensile or compressive stress.

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krautschik, Christof G Cupertino, CA 2 8
Lee, Sang H Sunnyvale, CA 21 487
Shroff, Yashesh A Santa Clara, CA 2 6

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