Positioning apparatus, exposure apparatus, and device manufacturing method
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United States of America Patent
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Oct 30, 2007
Grant Date -
Nov 17, 2005
app pub date -
May 12, 2005
filing date -
May 17, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A positioning apparatus including first and second bases, and two moving elements which are guided by the first and second bases to move on the first and second bases. The two moving elements are supported on the first and second bases by air bearings. A distance is ensured between the first and second bases, and when the two moving elements move between the first and second bases, both a guide surface of the first base and a guide surface of the second bases are used. Also, pneumatic pressures of the air bearings are increased to be higher than that in a case in which the moving elements move on the first and second bases.
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