Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers

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United States of America Patent

PATENT NO 8784974
APP PUB NO 20120223051A1
SERIAL NO

13473748

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Abstract

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Methods for fabricating sub-lithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Millward, Dan B Boise, US 79 3347

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